2009 | Achievement and Award
Prof. Koyanagi Succeeded in development of integration technology for a breakthrough integration system for the first time in the world
Professor Koyanagi developed Hetero-integration technology for a breakthrough integration system ombining different devices such as LSI, sensor, MEMS and bio-chips, for the first time in the world. With the rapid improvement of LSI performance and capacity, the production cost and electric power consumption have been raised as the problem. Professor Koyanagi successfully developed the technology which simultaneously combines more than one million of different kinds of chips such as LSI chips, sensor chips, MEMS chips and bio-chips on the large substrates by using the surface tension effect of liquid. This research achievement received a great publicity at the IEDM (International Electron Devices Meeting) conference held by IEEE. This new Japanese technology is expected to lead the world in the future in terms of establishing the new market developed in Japan.
Contact:Professor Mistumasa Koyanagi
Department of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University
Phone: +81 22-795-6906
