Professor Seiji Samukawa was awarded 2009 The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology, The Prize for Science and Technology

 

Professor Seiji Samukawa at Institute of Fluid Science, Tohoku University was awarded 2009 The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology, The Prize for Science and Technology, Research Category.

 

This prize aims to help improve the level of Science and Technology in Japan by motivating researchers who work on it. Researchers will be praised for their outstanding achievements in research and development, and promoting a better understanding on Science and Technology.

 

The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology consists of the following categories:

(1) Prizes for Science and Technology are awarded for researchers’ outstanding achievements.

 

(2) The Young Scientists' Prize is awarded for their outstanding abilities to conduct research and development.

 

(3) The Prize for Creativity is awarded for improving technologies in occupational fields by originality.

 

(4) The Prize to Schools for Nurturing Creativity is awarded to elementary or junior high schools that significantly encouraged children’s or students’ originality and ingenuity.

 

Professor Seiji Samukawa received The Prize for Science and Technology, Research Category

 

The reason to be awarded is the research on ultrahigh accurate processing technologies to prevent frequent damages to semiconductor devices. Professor Samukawa explains how Plasma etching processes, a key technology in production of semiconductor devices, cause damages to the board, and shows possible ultrahigh accurate processing technologies with minimum damages.

 

[Contact]

Professor Seiji Samukara

Intelligent Nano-Process Lab.,

Transdisciplinary Fluid Integration Research Center,
Institute of Fluid Science, Tohoku University