Professor Seiji Samukawa at Institute of Fluid Science, Tohoku University has received The 8th Plasma Electronics Prize from The Japan Society of Applied Physics. The reason to be awarded is the thesis "On-wafer monitoring of charge accumulation and sidewall conductivity in high-aspect-ratio contact holes during SiO2 etching process."

 Professor Samukawa shares the prize with Associate Professor Hiroto Ohtake at Institute of Fluid Science, Tohoku University, Butsurin Jinnai, Doctral student at Graduate School of Engineering, Tohoku University, Toshiyuki Orita at Oki Semiconductor Miyazaki Co., Ltd., Jun Hashimoto at Tokyo Electron Ltd. and Yoshinari Ichihashi at SANYO Electric Co., Ltd.

More Information (Japanese)

[Contact]

Professor Seiji Samukawa

Institute of Fluid Science, Tohoku University

TEL: +81-22-217-5240

E-mail: samukawa*ifs.tohoku.ac.jp (Replace * with @)