Professor Seiji Samukawa at Institute of Fluid Science, Tohoku University received Plasma Prize from American Vacuum Society. 

 Plasma Prize is given to researchers for their outstanding contribution and achievement in plasma science.  Professor Samukawa was praised for his creative research activities.  He has conducted pioneering studies to realize Super-low Damage Plasma Processes such as pulse-time-modulation plasma, neutral beam and the invention and presentation of on-wafer damage monitoring system.  This is the 11th prize, and the Professor Samukawa is the second Japanese recipient.

 The presentation ceremony will be held at Aztec conference room in Albuquerque during AVS 57th International Symposium from October 17 through October 22, 2010.

[Contact]
Professor Seiji Samukawa
Institute of Fluid Science, Tohoku University
TEL: +81-22-217-5240
E-mail: samukawa*ifs.tohoku.ac.jp (Replace * with @)